The Optical Aspect of Errors in Measurements of Surface Asperities Using the Optical Profilometry Method

Karol Grochalski (1) , Michał Wieczorowski (1) , Jihad H'Roura (2, 3) , Gaëtan Le Goïc (4, 5)

1 PUT - Poznan University of Technology
2 IRF-SIC - Laboratoire Image et Reconnaissance de Formes - Systèmes Intelligents et Communicants
3 Département de Mathématiques
4 Le2i - Laboratoire Electronique, Informatique et Image [UMR6306]
5 ImViA - Imagerie et Vision Artificielle [Dijon]

The paper presents the impact of lighting type and direction on measurements of surface asperities using focus-variation microscopy. Particular attention was paid to the direction of lighting when using a light ring. It was pointed out that the lighting direction directly affects the values of the parameters Rt, Rz, and Rc. The article also presents the impact of a light polarizer on the surface topography parameters. It has been shown that the positioning of a sample with a regular and directed structure relative to the optical axis of the light polarizer affects the accuracy of mapping surface asperities. The largest differences were observed for Rz and Rt parameters. A method of using an external polarizer mounted on a focus variation microscope lens was also presented. Keywords: surface topography,

Mots clés: optical profilometer; focus variation; polarizer; optical error

Domaines: Informatique [cs]; Informatique [cs]; Intelligence artificielle [cs.AI]

Karol Grochalski, Michał Wieczorowski, Jihad H'Roura, Gaëtan Le Goïc. The Optical Aspect of Errors in Measurements of Surface Asperities Using the Optical Profilometry Method. Frontiers in Mechanical Engineering, 2020, 6 (12), ⟨10.3389/fmech.2020.00012⟩. ⟨hal-02891150⟩