Automatic Processing Scheme for Low Laser Invasiveness Electro Optical Frequency Mapping mode

Abstract : Electro optical techniques are efficient backside contactless techniques usually used for design debug and defect location in modern VLSI. Unfortunately, the signal to noise ratio is quite low and depends on laser power with potential device stress due to long acquisition time or high laser power, especially in up to date technologies. Under these conditions, to maintain a good signal or image quality, specific signal or image processing techniques can be implemented. In this paper, we proposed a new spatial filtering by stationary wavelets and contrast enhancement which allows the use of low laser power and short acquisition time in image mode.
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https://hal-univ-bourgogne.archives-ouvertes.fr/hal-01442686
Contributeur : Le2i - Université de Bourgogne <>
Soumis le : vendredi 20 janvier 2017 - 19:03:22
Dernière modification le : jeudi 25 juillet 2019 - 16:34:16

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  • HAL Id : hal-01442686, version 1

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Anthony Boscaro, Sabir Jacquir, K. Sanchez, H. Terada, P. Perdu, et al.. Automatic Processing Scheme for Low Laser Invasiveness Electro Optical Frequency Mapping mode. 23rd IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), Jul 2016, Singapore, Singapore. IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits. ⟨hal-01442686⟩

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